It's a piece of cake. Disconnect the wire harness and loosen the clamps on either side of the MAF. Unclip the airbox lid so you can lift it, which will give you some wiggle room. Remove the hose from the engine intake side and then remove the MAF from the airbox lid.
I can't remember, but I'm pretty sure you have to remove the aluminum hose adapters to get to the elements. It's held together with 4 torx screws.
I just use Q-tips soaked in isopropyl alcohol to clean mine. Some people use MAF cleaner, but I've heard horror stories from people who use sprays... Plus, almost everyone has Q-tips and rubbing alcohol. Just remove as much dirt as you can, but be extremely careful, as the resistors soldered between the elements are very fragile.
MAF sensor...
The elements...
That's about 8 years of dirt and oil build-up...
As good as new!