[BNaylor]

No, I wouldn't. The chemicals in carb and throttle body cleaner are too strong and may damage the MAF specifically the thermistor like electrical components on the wire element and leaves a residue. TB cleaner contains petroleum based stuff like methanol, acetone, toluene, etc.

MAF spray is specially formulated not to damage a MAF or leave any residue. Contains carbon dioxide, (COzol) which is a special chemical, and hexane.

Also, you can use electrical contact spray cleaner or isopropyl alcohol with cotton swabs.